Process of structuring an active organic layer deposited on a substrate

US9553266B2 · kind B2 · utility

Assignee

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

• Marie Heitzmann · Le Pont-de-Claix, FR
• Simon Charlot · Montferrat, FR

Key dates

• Filing date: Mar 20, 2014
• Grant date: Jan 24, 2017
• Expiry date: Mar 20, 2034

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10K71/221

Abstract

A method of structuring an active organic layer deposited on a substrate, including depositing a sacrificial layer on the substrate by photolithography, the sacrificial layer being made of at least one resist, creating at least one pattern inside of the sacrificial layer, depositing an active organic layer on the sacrificial layer and in the pattern, depositing a protective layer made of organic polymer on the active layer and in the pattern of the resist sacrificial layer, removing the sacrificial layer by projection of a solvent on the resin forming the layer, and removing the protective layer by dissolving the polymer forming it in a solvent.