Tape sticking apparatus
US9555607B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 28, 2012 |
| Grant date | Jan 31, 2017 |
| Priority date | — |
| Expiry date | Sep 19, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2221/68381
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A tape sticking apparatus includes a rubber sheet that partitions an airtight space formed above a chamber into first and second airtight spaces and, a tape frame that holds a tape above the rubber sheet, and a supply/exhaust mechanism that switches between pressurizing and depressurizing by supplying gas to or sucking gas from the first and second airtight spaces. The gas supply/exhaust mechanism includes a first flow-rate control valve that controls the flow rate of sucked gas when the first airtight space is depressurized, and a second flow-rate control valve that controls the flow rate of supplied when the first airtight space is pressurized.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.