Deposition system with electrically isolated pallet and anode assemblies

US9556512B2 · kind B2 · utility

Assignee

• SUNPOWER CORPORATION · US

Inventors

• Peter John Cousins · Menlo Park, US
• Hsin-Chiao Luan · Palo Alto, US
• Thomas Pass · San Jose, US
• John Ferrer · Mason, US
• Rex Gallardo · Sta. Rosa, PH
• Stephen F. Meyer · Santa Clara, US

Key dates

• Filing date: Sep 10, 2013
• Grant date: Jan 31, 2017
• Expiry date: Jun 2, 2035

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/68771
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A system for substrate deposition is disclosed. The system includes a wafer pallet and an anode. The wafer pallet has a bottom and a top. The top of the wafer pallet is configured to hold a substrate wafer. The anode has a substantially fixed position relative to the wafer pallet and is configured to move with the wafer pallet through the deposition chamber. The anode is electrically isolated from the substrate wafer.