Integrated laser vibrometer MEMS micro-shell gyroscope
US9557173B1 · kind B1 · utility
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19Claims
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Key dates
| Filing date | Nov 19, 2014 |
| Grant date | Jan 31, 2017 |
| Priority date | — |
| Expiry date | Apr 18, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C25/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A gyroscope including a dielectric resonator, a laser vibrometer on a first side of the dielectric resonator, and a laser dump for redirecting or absorbing light received at the laser dump from the laser vibrometer, the laser dump on a second side of the dielectric resonator. A first distance between the dielectric resonator and the laser vibrometer ranges from 10 nm to 20 μm, and a second distance between the dielectric resonator and the laser dump ranges from 10 nm to 20 μm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.