Integrated magnetometer and its manufacturing process
US9557392B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jan 28, 2011 |
| Grant date | Jan 31, 2017 |
| Priority date | — |
| Expiry date | Feb 20, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R33/098
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Integrated magnetometer comprising a plurality of multilayer magnetoresistive sensors deposited on a surface, called the top surface, of a substantially planar substrate, characterized in that said top surface of the substrate has at least one cavity or protuberance provided with a plurality of inclined faces, and in that at least four said magnetoresistive sensors are placed on four said magnetoresistive sensors are placed on four said inclined faces, having different orientations and opposite one another in pairs, each sensor being sensitive to one component of an external magnetic field parallel to that face on which it is placed. Process for manufacturing such a magnetometer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.