Optical projection system

US9557653B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Johannes Rau · Gerstetten, DE
• Armin Schoeppach · Aalen, DE
• Bernhard Gellrich · Aalen, DE
• Jens Kugler · Heubach, DE
• Martin Mahlmann · Heidenheim, DE
• Bernhard Geuppert · Lauchheim, DE
• Thomas Petasch · Aalen, DE
• Gerhard Fuerter · Ellwangen, DE

Key dates

• Filing date: Jul 7, 2015
• Grant date: Jan 31, 2017
• Expiry date: Jul 29, 2035

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70883
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An optical projection unit includes first and second optical element modules. The first optical element module includes a first housing unit and a first optical element received within the first housing unit and having an optically used first region defining a first optical axis. The second optical element module is located adjacent to the first optical element module and includes a second optical element which defines a second optical axis of the optical projection unit. The first housing unit has a central first housing axis and an outer wall extending in a circumferential direction about the first housing axis. The first optical axis is laterally offset and/or inclined with respect to the first housing axis. The first housing axis is substantially collinear with the second optical axis.