Coating apparatus including nozzle cleaning mechanism and method of forming coating layer using the same
US9561521B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 29, 2010 |
| Grant date | Feb 7, 2017 |
| Priority date | — |
| Expiry date | Sep 13, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S135/902
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A coating apparatus includes: a nozzle having a nozzle front end configured to spray a coating solution and a head configured to store the coating solution; a movement axis configured to cause the nozzle to move back and forth in a straight line; a rotating connection member configured to connect the movement axis with the nozzle and allow the nozzle to rotate; a stage disposed under the movement axis; and a cleaning means disposed at an end of the movement axis, and having a nozzle front end insertion unit in a concave shape of the nozzle front end and a base fixing the insertion unit, wherein the nozzle is fixed in a normal direction of a surface of the stage by the movement axis, moves back and forth in an extension direction of the movement axis, and rotates with respect to the movement axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.