Method of cleaning glass substrates
US9561982B2 · kind B2 · utility
175Cited by
4References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 3, 2014 |
| Grant date | Feb 7, 2017 |
| Priority date | — |
| Expiry date | Feb 10, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02041
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A method of cleaning thin glass substrates comprises applying a sequence of chemical washing steps as the thin glass substrate is being conveyed in a conveyance direction. In addition, surfaces of the glass substrate may be treated to enhance electrostatic discharge properties of the glass substrates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.