Apparatus for inspecting curvature
US9562763B2 · kind B2 · utility
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6References
4Claims
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Assignee
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Key dates
| Filing date | Oct 29, 2014 |
| Grant date | Feb 7, 2017 |
| Priority date | — |
| Expiry date | Oct 29, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for inspecting curvature, including: a radiation unit radiating a plurality of rays of light having different focal lengths onto a surface of an target material; and an inspection unit inspecting the surface of the target material using the rays of light reflected from the target material. The apparatus can inspect the curvature or the bending of the surface of a target material at a high speed and with high accuracy.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.