Absolute and differential pressure transducer
US9562796B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 18, 2014 |
| Grant date | Feb 7, 2017 |
| Priority date | — |
| Expiry date | Aug 18, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/0092
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The disclosed embodiments include a combination absolute pressure and differential pressure transducer that includes at least a first cavity and a second cavity, at least a first pressure port and a second pressure port, a first isolation membrane exposing the first cavity to a first fluid pressure applied to the first pressure port, a second isolation membrane exposing the second cavity to a second fluid pressure applied to the second pressure port, at least one absolute pressure sense element exposed to absolute pressure in one of the first cavity and the second cavity, and at least one differential pressure sense element exposed to differential pressure between two of the first cavity and the second cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.