Shock sensor with latch mechanism and method of shock detection
US9562825B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 7, 2014 |
| Grant date | Feb 7, 2017 |
| Priority date | — |
| Expiry date | May 11, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/0891
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micromechanical shock sensor includes a proof mass coupled to a surface of a substrate and a projection element extending laterally from the proof mass. The shock sensor further includes a latch mechanism and a retention anchor. The latch mechanism has a latch spring attached to the surface and a latch tip extending from a movable end of the latch spring. The retention anchor is attached to the surface and is located proximate the latch tip. The proof mass is configured for planar movement relative to the substrate when the proof mass is subjected to a force of at least a threshold magnitude. Movement of the proof mass in response to the force causes the latch tip to become retained between the projection element and the retention anchor to place the shock sensor in a latched state. The latched state may be detected by optical inspection, probe, or external readout.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.