Force detection for microscopy based on direct tip trajectory observation
US9562927B2 · kind B2 · utility
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37Claims
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Key dates
| Filing date | Oct 1, 2015 |
| Grant date | Feb 7, 2017 |
| Priority date | — |
| Expiry date | Oct 1, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/34
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
With example embodiments described herein, a probe tip of a scanning probe microscope (such as an atomic force microscope (AFM)) is directly detected as it moves in a tapping mode to determine the tip positions over time, and a force for the tip is computed from these determined tip positions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.