Patent · US Active

Reactor device with removable deposition monitor

US9567661B2 · kind B2 · utility

2Cited by

20References

8Claims

0Family size

Assignee

Superconductor Technologies Inc. · US

Inventors

Ward Ruby · San Jose, US
Kurt Von Dessonneck · Auburn, US
Brian Moeckly · Menlo Park, US

Key dates

Filing date	Nov 6, 2015
Grant date	Feb 14, 2017
Priority date	—
Expiry date	Nov 6, 2035

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C14/566
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A reactor apparatus includes a first chamber coupled to a first source of vacuum, a monitor chamber isolated from the first chamber and coupled to a second source of vacuum, and at least one removable deposition monitor disposed in the monitor chamber.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.