Scanning probe sensor with a ferromagnetic fluid
US9568496B1 · kind B1 · utility
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1References
20Claims
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Assignee
Inventors
Key dates
| Filing date | Nov 17, 2015 |
| Grant date | Feb 14, 2017 |
| Priority date | — |
| Expiry date | Nov 17, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q70/14
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention is notably directed to a scanning probe sensor for a scanning probe microscope. The scanning probe sensor comprises a probe tip having a ferromagnetic fluid and a magnetic field generator adapted to generate a magnetic field acting on the ferromagnetic fluid. Furthermore, a sensor controller is provided and configured to control one or more parameters of the magnetic field generator, thereby controlling the shape of the fluid. The invention further concerns a related scanning probe sensor, a related method and a related computer program product.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.