Method for producing an integrated optical circuit

US9568676B2 · kind B2 · utility

Assignee

• CALIOPA N.V. · BE

Inventors

• Tom Collins · Munich, DE
• Martijn Tassaert · Munich, DE

Key dates

• Filing date: Aug 12, 2015
• Grant date: Feb 14, 2017
• Expiry date: Aug 12, 2035

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01S5/22
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A method for producing an integrated optical circuit comprising an active device and a passive waveguide circuit includes: applying an active waveguide structure on a source wafer substrate; exposing a portion of the source wafer substrate by selectively removing the active waveguide structure; applying a passive waveguide structure on the exposed portion of the source wafer substrate, wherein an aggregation of the active waveguide structure and the passive waveguide structure forms the active device, the active device having a bottom surface facing the source wafer substrate; removing the source wafer substrate from the active device; and attaching the active device to a target substrate comprising the passive waveguide circuit such that the bottom surface of the active device faces the target substrate.