Micromechanical resonators
US9571013B2 · kind B2 · utility
1Cited by
5References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 12, 2011 |
| Grant date | Feb 14, 2017 |
| Priority date | — |
| Expiry date | Apr 28, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/0233
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Embodiments of the invention include micromechanical resonators. These resonators can be fabricated from thin silicon layers. Both rotational and translational resonators are disclosed. Translational resonators can include two plates coupled by two resonate beams. A stable DC bias current can be applied across the two beams that causes the plates to resonate. In other embodiments, disk resonators can be used in a rotational mode. Other embodiments of the invention include using resonators as timing references, frequency sources, particle mass sensors, etc.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.