Patent · US Active

Microphone element and device for detecting acoustic and ultrasound signals

US9571938B2 · kind B2 · utility

4Cited by

16References

12Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Christoph Schelling · Stuttgart, DE
Rolf Scheben · Stuttgart, DE
Ricardo Ehrenpfordt · Gerlingen, DE

Key dates

Filing date	Dec 3, 2014
Grant date	Feb 14, 2017
Priority date	—
Expiry date	Dec 3, 2034

Classification

Technology area (CPC H)Electricity
CPC primaryH04R29/004
WIPO fieldAudio-visual technology
WIPO sectorElectrical engineering

Abstract

A capacitive MEMS microphone element is described which may be used optionally for detecting acoustic signals (microphone mode) or for detecting ultrasound signals in a defined frequency range (ultrasound mode). In the layered structure of the MEMS microphone element, at least two carrier elements for the two electrode sides of a capacitor system are formed one above the other and at a distance from one another for signal detection. At least one of the two carrier elements is sound pressure-sensitive and at least one of the two electrode sides includes at least two electrode segments which are electrically contactable independent of one another, which together with the at least one electrode of the other electrode side form partial capacitances which are independent of one another.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.