Patent · US Active

Apparatus and method for transporting a vessel to and from a PECVD processing station

US9572526B2 · kind B2 · utility

7Cited by
631References
2Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 16, 2014
Grant dateFeb 21, 2017
Priority date
Expiry dateJun 16, 2034

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T428/1383
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Methods for processing a vessel, for example to provide a gas barrier or lubricity, are disclosed. First and second PECVD or other vessel processing stations or devices and a vessel holder comprising a vessel port are provided. An opening of the vessel can be seated on the vessel port. The interior surface of the seated vessel can be processed via the vessel port by the first and second processing stations or devices. Vessel barrier, lubricity and hydrophobic coatings and coated vessels, for example syringes and medical sample collection tubes are disclosed. A vessel processing system and vessel inspection apparatus and methods are also disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.