High purity ozone generator for optics cleaning and recovery
US9573111B1 · kind B1 · utility
0Cited by
6References
9Claims
0Family size
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Key dates
| Filing date | Jul 5, 2013 |
| Grant date | Feb 21, 2017 |
| Priority date | — |
| Expiry date | Oct 14, 2034 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01B2201/82
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
An apparatus for producing a high purity stream of ozone including a reaction chamber having an inlet and an outlet, a gaseous feed stream having a first purified component and an ultraviolet source. The gaseous feed stream enters the reaction chamber through the inlet, the first purified component includes oxygen, the ultraviolet source forms ozone from the oxygen, and the ozone exits the reaction chamber through the outlet.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.