Controlled deposition of metal and metal cluster ions by surface field patterning in soft-landing devices
US9574263B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 12, 2013 |
| Grant date | Feb 21, 2017 |
| Priority date | — |
| Expiry date | Sep 4, 2034 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/112
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A soft-landing (SL) instrument for depositing ions onto substrates using a laser ablation source is described herein. The instrument of the instant invention is designed with a custom drift tube and a split-ring ion optic for the isolation of selected ions. The drift tube allows for the separation and thermalization of ions formed after laser ablation through collisions with an inert bath gas that allow the ions to be landed at energies below 1 eV onto substrates. The split-ring ion optic is capable of directing ions toward the detector or a landing substrate for selected components. The inventors further performed atomic force microscopy (AFM) and drift tube measurements to characterize the performance characteristics of the instrument.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.