Terahertz-wave detection element, manufacturing method therefor, and observation apparatus
US9574933B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 23, 2015 |
| Grant date | Feb 21, 2017 |
| Priority date | — |
| Expiry date | Jul 1, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/03
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided a terahertz-wave detection element with high spatial resolution and suppressing a crack occurrence. A method of manufacturing the detection element capable of detecting a spatial intensity distribution of a terahertz wave includes: a step of forming an oxide layer on one main surface of a first substrate consisting of an electro-optic crystal; a step of joining the one main surface of the first substrate and a second substrate by an adhesive consisting; a step of thinning the first substrate of a joined body, to a thickness of 1-30 μm by polishing the first substrate; and a step of obtaining a large number of terahertz-wave detection elements by cutting the joined body. The oxide layer is formed such that the first substrate becomes convex to a side of the one main surface by causing a tensile stress to act on it.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.