Photoimageable compositions containing oxetane functionality
US9575409B2 · kind B2 · utility
3Cited by
0References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 20, 2015 |
| Grant date | Feb 21, 2017 |
| Priority date | — |
| Expiry date | Nov 20, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/325
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Embodiments in accordance with the present invention encompass negative-tone, solvent developable, self-imageable polymer compositions useful for forming films that can be patterned to create structures for microelectronic devices, microelectronic packaging, microelectromechanical systems, optoelectronic devices and displays.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.