Tunable MEMS capacitor
US9576738B2 · kind B2 · utility
1Cited by
18References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 17, 2014 |
| Grant date | Feb 21, 2017 |
| Priority date | — |
| Expiry date | Nov 17, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01G2005/02
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A capacitive MEMS structure comprising first and second opposing capacitor electrode arrangements, wherein at least one of the electrode arrangements is movable, and a dielectric material located adjacent to the second electrode arrangement, wherein the second electrode arrangement is patterned such that it includes electrode areas and spaces adjacent to the electrode areas, and wherein the dielectric material extends at least partially in or over the spaces.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.