Patent · US Active

Integrated imaging device for infrared radiation and method of production

US9577001B2 · kind B2 · utility

8Cited by

1References

27Claims

0Family size

Assignee

AMS AG · AT

Inventors

Hubert Enichlmair · Weinitzen, AT
Rainer Minixhofer · Kufstein, AT
Martin Schrems · Langenbruck, DE

Key dates

Filing date	Apr 15, 2014
Grant date	Feb 21, 2017
Priority date	—
Expiry date	Apr 15, 2034

Classification

Technology area (CPC H)Electricity
CPC primaryH01L2924/0002
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The integrated imaging device comprises a substrate (1) with an integrated circuit (4), a cover (2), a cavity (6) enclosed between the substrate (1) and the cover (2), and a sensor (5) or an array of sensors (5) arranged in the cavity (6). A surface (11, 12) of the substrate (1) or the cover (2) opposite the cavity (6) has a structure (8) directing incident radiation. The surface structure (8) may be a plate zone or a Fresnel lens focusing infrared radiation and may be etched into the surface of the substrate or cover, respectively.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.