High temperature gas line heater system including silicone foam rubber
US9578689B2 · kind B2 · utility
1Cited by
9References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 24, 2013 |
| Grant date | Feb 21, 2017 |
| Priority date | — |
| Expiry date | Nov 4, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B2203/022
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A semi-flexible laminar silicone foam rubber-base heater for high temperature gas supply and exhaust lines used in microelectronic semiconductor fabrication uses superimposed adhesively bonded layers of an etched foil heater element containing layer, a high-to-low heat thermal transition layer, a thermal fuse laden silicone foam rubber insulation layer and a durable wrapping layer. The system can provide for the combined use of highly controllable etched foil heater elements, clean silicone foam rubber insulation, and inexpensive mechanical thermal fuses safely in a high heat gas supply and exhaust line environment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.