Patent · US Active

Mechanical connection forming a pivot for MEMS and NEMS mechanical structures

US9581188B2 · kind B2 · utility

2Cited by

8References

19Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Guillaume Jourdan · Grenoble, FR
Dirk Ettelt · Gelsenkirchen, DE
Patrice Rey · Voiron, FR
Arnaud Walther · Grenoble, FR

Key dates

Filing date	Dec 12, 2012
Grant date	Feb 28, 2017
Priority date	—
Expiry date	Dec 18, 2032

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T403/32606
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A mechanical connection between two parts of a microelectromechanical and/or nanoelectromechanical structure forming a pivot with an axis of rotation pivot includes two first beams with an axis parallel to the pivot axis, the first beams configured to work in torsion, and two second beams with an axis orthogonal to the axis of the first beams, the second beams configured to work in bending, each one of the first and second beams being connected at their ends to the two parts of the structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.