Laser probe for use in an inspection system
US9581556B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 17, 2015 |
| Grant date | Feb 28, 2017 |
| Priority date | — |
| Expiry date | Aug 3, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/9548
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A non-contact optical probe for inspecting an inside surface of a cylindrical workpiece includes a laser source that emits an incident light beam, a polarizing beam splitter that transmits one polarization of the incident beam and reflects the opposite polarization, and a quarter wave plate that together with the polarizing beam splitter separates back reflected return light from the incident laser beam. The non-contact optical probe further includes an optical system that directs the incident laser beam onto the cylinder surface and directs reflected light from the surface back to the beam splitter, and at least one detector that receives a portion of the reflected light and generates data about the cylinder surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.