Liquid crystal modulator for detecting a defective substrate and inspection apparatus having the same
US9581842B2 · kind B2 · utility
2Cited by
1References
19Claims
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Key dates
| Filing date | Apr 8, 2014 |
| Grant date | Feb 28, 2017 |
| Priority date | — |
| Expiry date | Aug 15, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/133773
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inspection apparatus for detecting a defect of a substrate is provided. The inspection apparatus includes a liquid crystal modulator, a light emitting unit, a beam splitter, and a measurement unit. The liquid crystal modulator includes a reflection layer, a liquid crystal layer, an electrode, and a polarizer. The reflection layer reflects a light. The sensor layer includes a hybrid aligned nematic liquid crystal. The electrode is provided on the liquid crystal layer. The polarizer is provided on the electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.