Slot die coating apparatus and coating method using the same
US9581872B2 · kind B2 · utility
0Cited by
2References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 16, 2015 |
| Grant date | Feb 28, 2017 |
| Priority date | — |
| Expiry date | Feb 16, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/134345
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A slot die coater planarizing an upper surface of an encapsulation layer and a coating method using the same. The slot die coater includes a slit nozzle configured to supply a coating solution. The slit nozzle includes a hole vertically penetrating a center portion thereof, a first bottom surface disposed at a movement direction side of the slit nozzle with reference to the hole, and a second bottom surface disposed at an opposite direction side of the movement direction of the slit nozzle with reference to the hole. A width of the first bottom surface is different from the width of the second bottom surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.