Agglutinant for pellicle and a pellicle including the same
US9581896B2 · kind B2 · utility
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9Claims
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Key dates
| Filing date | Mar 16, 2015 |
| Grant date | Feb 28, 2017 |
| Priority date | — |
| Expiry date | Jul 3, 2035 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC09K2211/1033
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
There is provided a pellicle 1 for lithography having a frame 12, a film 11 and an agglutinant layer 13 (an adhesive to bond the pellicle on a photomask), in which the agglutinant layer 13 is doped with a luminescence material so as to facilitate the inspection of the quality of the adhesion between the agglutinant layer 13 and the photomask; preferably the luminescence material is a kind that glows in response to UV irradiation, and a preferable dosage of the luminescence material is no less than 0.01 mass % but less than 1.0 mass %.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.