Shaped cavity for SiGe filling material
US9583620B2 · kind B2 · utility
2Cited by
10References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 8, 2015 |
| Grant date | Feb 28, 2017 |
| Priority date | — |
| Expiry date | May 8, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/0243
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention is directed to semiconductor processes and devices. More specifically, embodiments of the present invention provide a semiconductor device that comprises a diamond-shaped cavity, and the shaped cavity is filled with silicon and germanium material. There are other embodiments as well.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.