RF impedance matching network
US9584090B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 4, 2016 |
| Grant date | Feb 28, 2017 |
| Priority date | — |
| Expiry date | Mar 4, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H7/40
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An RF impedance matching network includes a transformation circuit coupled to an RF input and configured to provide a transformed impedance that is less than a fixed source impedance; a first shunt circuit in parallel to the RF input, the first shunt circuit including a first shunt variable component providing a first variable capacitance or inductance; and a first virtual ground coupled to the first shunt variable component and a ground; and a second shunt circuit in parallel to the RF input and, the second shunt circuit including a second shunt variable component providing a second variable capacitance or inductance; and a second virtual ground coupled to the second shunt variable component and the ground.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.