Micro-structured atomic source system
US9585237B2 · kind B2 · utility
2Cited by
1References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 9, 2015 |
| Grant date | Feb 28, 2017 |
| Priority date | — |
| Expiry date | Apr 9, 2035 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/0133
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A micro-structured atomic source system is described herein. One system includes a silicon substrate, a dielectric diaphragm, wherein the dielectric diaphragm includes a heater configured to heat an atomic source substance, an intermediary material comprising a chamber configured to receive the atomic source substance, and a guide material configured to direct a flux of atoms from the atomic source substance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.