Patent · US Active

High speed high resolution heterodyne interferometric method and system

US9587927B2 · kind B2 · utility

2Cited by

3References

3Claims

0Family size

Assignee

HARBIN INSTITUTE OF TECHNOLOGY · CN

Inventors

Jiubin Tan · Jingwei, CN
Pengcheng Hu · Xing'an, CN
Xiaofei Diao · Xing'an, CN

Key dates

Filing date	Nov 8, 2012
Grant date	Mar 7, 2017
Priority date	—
Expiry date	Mar 7, 2033

Classification

Technology area (CPC G)Physics
CPC primaryG02B27/283
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A high speed high resolution heterodyne interferometric method and system are provided. The invention uses two spatially separated beams with slightly different frequencies and has two measurement signals with opposite Doppler shift. The switching circuit selects one of the two measurement signals for displacement measurement according to the direction and speed of the target movement. In this invention, the measurement is insensitive to the thermal variation; the periodic nonlinearity is essentially eliminated by using two spatially separated beams; the measurable target speed of the interferometer is no longer limited by the beat frequency of the laser source.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.