Sensor device and method for producing a sensor device
US9587968B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 18, 2014 |
| Grant date | Mar 7, 2017 |
| Priority date | — |
| Expiry date | Sep 26, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/414
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor device includes a sensor element configured to detect a measurement value based at least in part upon a physical variable, and a support element configured to support the sensor element. The support element has at least one connection region which is located in a section of the support element, and which is configured to connect the section of the support element to a section of the sensor element such that the sensor element is mounted so as to be movable with respect to the support element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.