Patent · US Active

Sensor device and method for producing a sensor device

US9587968B2 · kind B2 · utility

0Cited by
1References
12Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 18, 2014
Grant dateMar 7, 2017
Priority date
Expiry dateSep 26, 2034

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N27/414
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A sensor device includes a sensor element configured to detect a measurement value based at least in part upon a physical variable, and a support element configured to support the sensor element. The support element has at least one connection region which is located in a section of the support element, and which is configured to connect the section of the support element to a section of the sensor element such that the sensor element is mounted so as to be movable with respect to the support element.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.