Airflow measuring apparatus including a ventilation hole between a connector part and a circuit chamber
US9587970B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 7, 2011 |
| Grant date | Mar 7, 2017 |
| Priority date | — |
| Expiry date | Oct 15, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N10/01
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An airflow measuring apparatus includes a sub-passage that takes in part of flow of fluid flowing through an intake pipe, a sensor element disposed in the sub-passage to measure the flow of fluid, a circuit part converting the flow of fluid detected by the sensor element into an electric signal, a connector part connected to the circuit part to output a signal externally, and a casing supporting the sensor element and the circuit part. The sensor element is disposed in the intake pipe, and includes a cavity disposed at a semiconductor substrate and a diaphragm including a thin film part that covers the cavity. The sensor element on a lead frame has surfaces that are mold-packaged with resin so that the diaphragm and part of the lead frame are exposed. One hole is disposed at the lead frame for communication between the cavity and exterior.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.