Patent · US Active

Resonant MEMS lorentz-force magnetometer using force-feedback and frequency-locked coil excitation

US9588190B2 · kind B2 · utility

6Cited by

3References

25Claims

0Family size

Assignee

Silicon Laboratories Inc. · US

Inventors

Eric B. Smith · Austin, US
Riad Wahby · Austin, US
Yan Zhou · Solna, SE

Key dates

Filing date	Dec 28, 2012
Grant date	Mar 7, 2017
Priority date	—
Expiry date	Apr 17, 2034

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B3/0032
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method includes supplying a current to at least one conductive path integral with a MEMS device to thereby exert a Lorentz force on the MEMS device in the presence of a magnetic field. The method includes determining the magnetic field based on a control value in a control loop configured to maintain a constrained range of motion of the MEMS device. The control loop may be configured to maintain the MEMS device in a stationary position. The current may have a frequency equal to a resonant frequency of the MEMS device.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.