Fabry-perot interferometer and a method for producing the same with decreased bending
US9588334B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 8, 2013 |
| Grant date | Mar 7, 2017 |
| Priority date | — |
| Expiry date | May 8, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49826
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to a Fabry-Perot interferometer and a method for producing the same. More specifically, the invention relates to Fabry-Perot interferometers which are controllable with one or several actuators, such as piezoelectric, electrostrictive or flexoelectric actuators. In prior art technology there is a problem to achieve a sufficiently small and uniform gap between mirrors. In the present invention an intermediate structure (85a, 85b, 95a, 95b, 81a, 81b, 91a, 91b, 98a, 98b) is used between a mirror and an actuator or between two mirrors. The method of production also includes measuring the width distribution of the gap in several phases, and providing pre-actuation of actuators.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.