MEMS variable capacitor with enhanced RF performance
US9589731B2 · kind B2 · utility
0Cited by
8References
13Claims
0Family size
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Key dates
| Filing date | Sep 4, 2012 |
| Grant date | Mar 7, 2017 |
| Priority date | — |
| Expiry date | May 20, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01G5/18
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
In a MEMS device, the manner in which the membrane lands over the RF electrode can affect device performance. Bumps or stoppers placed over the RF electrode can be used to control the landing of the membrane and thus, the capacitance of the MEMS device. The shape and location of the bumps or stoppers can be tailored to ensure proper landing of the membrane, even when over-voltage is applied. Additionally, bumps or stoppers may be applied on the membrane itself to control the landing of the membrane on the roof or top electrode of the MEMS device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.