Deflection plate and deflection device for deflecting charged particles
US9589762B2 · kind B2 · utility
0Cited by
7References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 1, 2012 |
| Grant date | Mar 7, 2017 |
| Priority date | — |
| Expiry date | Jun 1, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H2007/002
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A deflection plate for deflecting charged particles, the plate comprising a recess is provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.