Compositions of low-K dielectric sols containing nonmetallic catalysts
US9589789B2 · kind B2 · utility
1Cited by
6References
21Claims
0Family size
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Key dates
| Filing date | Dec 21, 2015 |
| Grant date | Mar 7, 2017 |
| Priority date | — |
| Expiry date | Dec 21, 2035 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC08J2300/00
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A sol composition for producing a porous low-k dielectric material is provided. The composition can include at least one silicate ester, a polar solvent, water, an acid catalyst for silicate ester hydrolysis, an amphiphilic block copolymer surfactant, and a nonmetallic catalyst that reduces dielectric constant in the produced material. The composition can further include a metallic ion at a lower parts-per-million concentration than the nonmetallic catalyst, and/or the composition can further include a cosolvent. A method of preparing a thin film on a substrate using the sol composition is also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.