Electrode manufacturing method, fuse device and manufacturing method therefor
US9589837B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 15, 2013 |
| Grant date | Mar 7, 2017 |
| Priority date | — |
| Expiry date | Oct 15, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present disclosure relates to an electrode manufacturing method, and a fuse device and manufacturing method therefor. The fuse device includes a fuse element including a phase change material, and a first electrode formed in contact with the fuse element. The phase change material may include doped or undoped chalcogenide. The first electrode may have a sublithographic dimension at a portion where the first electrode contacts the fuse element. When the phase change material has a layer thickness less than or equal to about 30 nm, and a pulse current less than or equal to about 3 mA is applied to the fuse element via the first electrode, the fuse element may undergo a phase change, so as to convert the fuse device into a blow-out state.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.