Patent · US Active

Compensation of second order temperature dependence of mechanical resonator frequency

US9590587B1 · kind B1 · utility

7Cited by

11References

17Claims

0Family size

Assignee

Analog Devices, Inc. · US

Inventors

Florian Thalmayr · Unterhaching, DE
Jan H. Kuypers · Cambridge, US
Andrew Sparks · Honolulu, US

Key dates

Filing date	Jul 5, 2012
Grant date	Mar 7, 2017
Priority date	—
Expiry date	May 12, 2033

Classification

Technology area (CPC H)Electricity
CPC primaryH03H2009/241
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

Apparatus and methods for control of the second order temperature dependence of the frequency of a mechanical resonating structure are described. The second order temperature dependence of frequency of the mechanical resonating structure may be non-linear. Control may be provided by doping of a semiconductor layer of the mechanical resonating structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.