Compounds for enhancing generation of chemical species
US9593060B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 18, 2014 |
| Grant date | Mar 14, 2017 |
| Priority date | — |
| Expiry date | Nov 18, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0397
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
A reagent that enhances acid generation of a photoacid generator and composition containing such reagent is disclosed. Also described is a method for manufacturing a device, the method including applying a liquid containing a composition to a member such that a coating film including the composition is formed on the member; and exposing the coating film to at least one of a first electromagnetic ray and a first particle ray such that a first portion of the coating film is exposed to the at least one of the first electromagnetic ray and the first particle ray while a second portion of the coating film is not exposed to the at least one of the first electromagnetic ray and the first particle ray.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.