Yaw-rate sensor

US9593949B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Reinhard Neul · Stuttgart, DE
• Johannes Classen · Reutlingen, DE
• Torsten Ohms · Lambach, DE
• Burkhard Kuhlmann · Reutlingen, DE
• Axel Franke · Ditzingen, DE
• Oliver Kohn · Reutlingen, DE
• Daniel Christoph Meisel · Pittsburgh, US
• Joerg Hauer · Reutlingen, DE
• Udo-Martin Gomez · Leonberg, DE
• Kersten Kehr · Zwota, DE

Key dates

• Filing date: Dec 30, 2015
• Grant date: Mar 14, 2017
• Expiry date: Dec 30, 2035

Classification

• Technology area (CPC G): Physics
• CPC primary: G01P3/44
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.