Pellicle
US9594300B2 · kind B2 · utility
1Cited by
2References
4Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 25, 2014 |
| Grant date | Mar 14, 2017 |
| Priority date | — |
| Expiry date | May 22, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/62
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
There is provided a pellicle having a frame, a membrane and an agglutinant layer (adhesive to bond the pellicle on a photo mask) in which the release liner (detachable sheet) laid to the agglutinant layer for protection thereof is controlled to have a surface roughness of 5-30 micrometers on the side of the liner which is attached to the agglutinant layer, with a result that the releasability of the liner is improved suitably.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.