Method of manufacturing electromechanical transducer, electromechanical transducer, droplet discharge head, droplet discharge apparatus, and image forming apparatus
US9595660B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 10, 2015 |
| Grant date | Mar 14, 2017 |
| Priority date | — |
| Expiry date | Apr 15, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A method of manufacturing an electromechanical transducer includes forming a first electrode on a substrate or a base film, forming a piezoelectric film made of lead zirconate titanate on the first electrode, forming a second electrode on the piezoelectric film, and polarizing the piezoelectric film. The polarizing includes applying to the second electrode a positive polarity voltage having a positive polarity relative to a potential of the first electrode, and satisfying a first expression of −EcP−(−Ec)<0 and a second expression of |−EcP−(−Ec)|>0.15×EcPav, where −Ec represents an initial coercive field of a negative polarity side of the electromechanical transducer, −EcP represents a coercive field of the negative polarity side after the applying, EcP represents a coercive field of a positive polarity side after the applying, and EcPav represents an average of absolute values of the coercive field −EcP and the coercive field EcP.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.