Pressure sensors for small-scale applications and related methods
US9596988B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Oct 12, 2012 |
| Grant date | Mar 21, 2017 |
| Priority date | — |
| Expiry date | Jan 8, 2033 |
Classification
- Technology area (CPC A)Human Necessities
- CPC primaryA61B2562/12
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
Certain pressure sensor devices are much smaller than prior art devices, yet are at least as sensitive as the prior art devices. A capacitive pressure sensor can include a flexible substrate that permits bending of a pressure sensing region without significantly affecting operation thereof. The pressure sensor can include a flexible membrane in which an electrode is sandwiched between two layers of polymeric material. The sandwiched electrode can be extremely close to a reference electrode so as to provide for highly sensitive capacitance readings, yet the membrane can be restricted from contacting the reference electrode under high pressure conditions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.