Biaxial tensile stage for fabricating and tuning wrinkles
US9597833B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 6, 2015 |
| Grant date | Mar 21, 2017 |
| Priority date | — |
| Expiry date | Sep 29, 2035 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB29L2009/008
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
Wrinkling of thin films is a strain-driven process that enables scalable and low-cost fabrication of periodic micro and nano scale patterns. However, real-world application is limited by the inability of current tools to provide the means for applying large, accurate, and non-equal biaxial strains via a device that can fit within the vacuum chambers that are required for thin film deposition/growth during wrinkling. The present biaxial tensile stage is a compact system that enables one to apply large and accurate non-equal biaxial strains to elastomeric films. It consists of (i) fixtures to clamp and hold films onto the stage, (ii) linear bearings for motion guidance, (iii) integrated actuators for real-time stretch control, (iv) base with kinematic coupling for registration to a metrology system, and (v) the structural frame.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.