Pellicle frame and process for manufacturing same
US9598790B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 27, 2013 |
| Grant date | Mar 21, 2017 |
| Priority date | — |
| Expiry date | Nov 27, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/257
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Provided is a pellicle frame that can prevent generation of haze and reduces a surface glittering defect under irradiation with collected light, and a method of manufacturing the same. The pellicle frame is obtained by using an aluminum frame material having a structure satisfying predetermined conditions on the circle-equivalent diameters of a Mg2Si crystallized product, an AlCuMg crystallized product, an Al—Fe-based crystallized product (AlmFe or Al7Cu2Fe), and an Al2CuMg crystallized product and on the area ratios of those crystallized products each having a circle-equivalent diameter of 1 μm or more, and in addition, subjecting the aluminum frame material to anodic oxidation processing using an alkaline electrolytic solution containing as an electrolyte a predetermined organic acid salt. In addition, the method of manufacturing a pellicle frame includes: preparing an aluminum frame material having a structure as described above; and subjecting the aluminum frame material to anodic oxidation processing using an alkaline electrolytic solution containing a predetermined organic acid salt, to form an anodic oxide film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.